![](/develop/static/imgs/pdf.png)
温度对碳热还原/氮化法合成氮化硅的影响
{{custom_author.name}}, {{article.zuoZheCn}}
温度对碳热还原/氮化法合成氮化硅的影响
Temperature effect on carbothermal reduction and nitridation synthesis of silicon nitride
[{{custom_ref.label}}] |
{{custom_citation.content}}
CrossRef
ADS
Pubmed
arXiv
Google scholar
|
/
〈 |
|
〉 |