TY - Front. Phys. A1 - DAI Zhong-ling, WANG You-nian T1 - Characteristics of single and dual radio-frequency (RF) plasma sheaths Y1 - 2006-06-05 JF - Frontiers of Physics JO - Front. Phys. SP - 178 EP - 185 VL - 1 IS - 2 UR - https://journal.hep.com.cn/fop N1 - 10.1007/s11467-006-0001-4 ER -