@article{DAI Zhong-ling:178, author = {DAI Zhong-ling, WANG You-nian}, title = {Characteristics of single and dual radio-frequency (RF) plasma sheaths}, publisher = {Front. Phys. }, year = {2006}, journal = {Frontiers of Physics}, volume = {1}, number = {2}, eid = {178}, numpages = {7}, pages = {178}, keywords = {plasma, sheath, ratio-frequency, fluid model, Monte-Carlo method, simulation}, url = {https://journal.hep.com.cn/fop/EN/abstract/article_8724.shtml}, doi = {10.1007/s11467-006-0001-4} }