TY - Front. Mater. Sci. A1 - WANG Mei, HE Ye-dong T1 - Growth and passivation of aluminum etch tunnels at on-off controlling DC Y1 - 2008-09-05 JF - Frontiers of Materials Science JO - Front. Mater. Sci. SP - 301 EP - 305 VL - 2 IS - 3 UR - https://journal.hep.com.cn/foms N1 - 10.1007/s11706-008-0047-z ER -