TY - Front. Optoelectron. A1 - Liu Shiyuan, Wu Xiaojian, Qin Xinyi T1 - A real-time exposure dose control algorithm for DUV excimer lasers Y1 - 2008-06-05 JF - Frontiers of Optoelectronics JO - Front. Optoelectron. SP - 123 EP - 129 VL - 1 IS - 1-2 UR - https://journal.hep.com.cn/foe N1 - 10.1007/s12200-008-0015-3 ER -