TY - Front. Optoelectron. A1 - Zhaoyun ZHANG, Yang GAO, Wei SU T1 - Laser self-mixing interferometer for MEMS dynamic measurement Y1 - 2013-06-05 JF - Frontiers of Optoelectronics JO - Front. Optoelectron. SP - 210 EP - 215 VL - 6 IS - 2 UR - https://journal.hep.com.cn/foe N1 - 10.1007/s12200-013-0318-x ER -