TY - Front. Mech. Eng. A1 - LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui T1 - Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool Y1 - 2006-03-05 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 6 EP - 13 VL - 1 IS - 1 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-005-0003-x ER -