TY - Front. Mech. Eng. A1 - GUO Xiaoguang, GUO Dongming, KANG Renke, JIN Zhuji T1 - Theoretical and experimental analysis on super precision grinding of monocrystal silicon Y1 - 2007-06-05 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 137 EP - 143 VL - 2 IS - 2 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-007-0023-9 ER -