TY - Front. Mech. Eng. A1 - Lili CHEN, Wu ZHOU T1 - Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer Y1 - 2013-06-05 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 146 EP - 149 VL - 8 IS - 2 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-013-0260-z ER -