TY - Front. Mech. Eng. A1 - Zhigang DONG, Qian ZHANG, Haijun LIU, Renke KANG, Shang GAO T1 - Effects of taping on grinding quality of silicon wafers in backgrinding Y1 - 2021-09-15 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 559 EP - 569 VL - 16 IS - 3 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-020-0624-0 ER -