TY - Front. Mech. Eng. A1 - Chuang YUE, Jing LI, Liwei LIN T1 - Fabrication of Si-based three-dimensional microbatteries: A review Y1 - 2017-10-31 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 459 EP - 476 VL - 12 IS - 4 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-017-0462-x ER -