TY - Front. Mech. Eng. A1 - Dehui XU, Yuelin WANG, Bin XIONG, Tie LI T1 - MEMS-based thermoelectric infrared sensors: A review Y1 - 2017-10-31 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 557 EP - 566 VL - 12 IS - 4 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-017-0441-2 ER -