@article{LU Bing-heng:6, author = {LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui}, title = {Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool}, publisher = {Front. Mech. Eng.}, year = {2006}, journal = {Frontiers of Mechanical Engineering}, volume = {1}, number = {1}, eid = {6}, numpages = {7}, pages = {6}, keywords = {step imprint lithography, tool, nanopositioning}, url = {https://journal.hep.com.cn/fme/EN/abstract/article_8207.shtml}, doi = {10.1007/s11465-005-0003-x} }