@article{Chuang YUE:459, author = {Chuang YUE, Jing LI, Liwei LIN}, title = {Fabrication of Si-based three-dimensional microbatteries: A review}, publisher = {Front. Mech. Eng.}, year = {2017}, journal = {Frontiers of Mechanical Engineering}, volume = {12}, number = {4}, eid = {459}, numpages = {17}, pages = {459}, keywords = {three-dimensional (3D);wafer-scale;Si-based anode;micro-LIBs;thin-film deposition}, url = {https://journal.hep.com.cn/fme/EN/abstract/article_20156.shtml}, doi = {10.1007/s11465-017-0462-x} }