@article{Albert ALBERS:261, author = {Albert ALBERS, Duotai PAN, Leif MARXEN, Claudia BECKE, }, title = {Application and evaluation of optical distance measurements in geometrical quality testing of microgears}, publisher = {Front. Mech. Eng.}, year = {2010}, journal = {Frontiers of Mechanical Engineering}, volume = {5}, number = {3}, eid = {261}, numpages = {8}, pages = {261}, keywords = {microgear; optical distance measurement; profile deviation; CWL sensor; micromechanical technology (MMT) }, url = {https://journal.hep.com.cn/fme/EN/abstract/article_10049.shtml}, doi = {10.1007/s11465-010-0100-3} }