@article{Guanglan LIAO:87, author = {Guanglan LIAO, Xuekun ZHANG, Xiaohui LIN, Canghai MA, Lei NIE, Tielin SHI, }, title = {Ultraviolet exposure enhanced silicon direct bonding}, publisher = {Front. Mech. Eng.}, year = {2010}, journal = {Frontiers of Mechanical Engineering}, volume = {5}, number = {1}, eid = {87}, numpages = {5}, pages = {87}, keywords = {ultraviolet (UV) exposure; silicon direct bonding; bonding strength; reliability }, url = {https://journal.hep.com.cn/fme/EN/abstract/article_10024.shtml}, doi = {10.1007/s11465-009-0078-x} }