Figure 9 shows the high-resolution XPS spectra of Cr and Fe elements. The Cr element exists in the forms of Cr(0), Cr
2O
3, Cr(OH)
3, and CrO
3 on the outmost surface of the electropolished horizontal surface. Cr(O) was obtained from the original workpiece composition, and other compositions were generated from electropolishing because a passive oxide film was generated on the workpiece instead of the original film formed in the air. The dominant distribution of Cr element is in the form of Cr(OH)
3, which has the binding energy of 577.3 eV, for the different electropolished surfaces. This phenomenon has been reported in the previous study on electropolishing 316L SS [
35]. Furthermore, CrO
3 was only measured on the electropolished horizontal surface. The CrO
3 was reported to exist in the passive oxide film of 316L SS, which is related to a high electrolyte pH and a potential drop across the oxide film [
43]. The horizontal and vertical surfaces were electropolished under the same conditions. Thus, the generation of CrO
3 in the passive oxide film is also associated with the anisotropy characteristics of the workpiece. Cr6+ is harmful to the environment due to its toxicity property [
41]. Therefore, the electropolishing of vertical surface should focus on the eco-friendly environment. High XPS resolution spectra of Iron exists in the forms of Fe(0), FeS, FeO, Fe
2O
3, and FeOOH on the different electropolished surfaces, indicating that the similar anodic dissolution reactions occur during the electropolishing of different surfaces. The peaks at a binding energy of 710.9 and 711.8 eV in Fig. 9(b) are considered the composition of Fe
2O
3 and FeOOH, respectively. The dominant Fe
2O
3 and FeOOH have similar area percentage in the high XPS spectrum of iron from the electropolished horizontal and vertical surfaces, as shown in Fig. 10. This finding verified the occurrence of similar anodic dissolution reactions in the electropolishing of different surfaces. The area percentage of Fe
2O
3 composition was much higher than that obtained from the electropolishing of commercial 316L SS [
35]. This condition is due to the different manufacturing processes of the workpiece that result in the difference in the composition of the oxide film formed on electropolished surfaces.