Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

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Front. Mater. Sci. ›› 2009, Vol. 3 ›› Issue (4) : 409-414. DOI: 10.1007/s11706-009-0070-8
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Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

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