@article{Peng WANG:53, author = {Peng WANG, Aron MICHAEL, Chee Yee KWOK}, title = {Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM}, publisher = {Front. Optoelectron.}, year = {2018}, journal = {Frontiers of Optoelectronics}, volume = {11}, number = {1}, eid = {53}, numpages = {6}, pages = {53}, keywords = {atomic force microscopy (AFM);silicon waveguide;silicon coupler;high aspect ratio (HAR) nano-tips}, url = {https://journal.hep.com.cn/foe/EN/abstract/article_22086.shtml}, doi = {10.1007/s12200-018-0774-4} }