RT Journal T1 Manufacturing error analysis of compliant 3-DOF microrobot A1 CHAO Dai-hong, LIU Rong, WU Yue-min, SHI Long, ZONG Guang-hua PB Front. Mech. Eng. FD 2006-09-05 YR 2006 JF Frontiers of Mechanical Engineering JO Front. Mech. Eng. VO 1 IS 3 SP 299 DO 10.1007/s11465-006-0030-2 K1 error analysis, finite element method, flexure hinges, micromanipulator, parallel mechanism LK {https://journal.hep.com.cn/fme/EN/article/article_8222.shtml}