RT Journal T1 Special issue: Micro-electromechanical systems (MEMS) A1 Zhuangde JIANG PB Front. Mech. Eng. FD 2017-10-31 YR 2017 JF Frontiers of Mechanical Engineering JO Front. Mech. Eng. VO 12 IS 4 SP 457 DO 10.1007/s11465-017-0492-4 K1 LK {https://journal.hep.com.cn/fme/EN/article/article_20859.shtml}