RT Journal T1 Fabrication of Si-based three-dimensional microbatteries: A review A1 Chuang YUE, Jing LI, Liwei LIN PB Front. Mech. Eng. FD 2017-10-31 YR 2017 JF Frontiers of Mechanical Engineering JO Front. Mech. Eng. VO 12 IS 4 SP 459 DO 10.1007/s11465-017-0462-x K1 three-dimensional (3D);wafer-scale;Si-based anode;micro-LIBs;thin-film deposition LK {https://journal.hep.com.cn/fme/EN/article/article_20156.shtml}