TY - Front. Mech. Eng. A1 - Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN T1 - A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method Y1 - 2013-12-05 JF - Frontiers of Mechanical Engineering JO - Front. Mech. Eng. SP - 333 EP - 339 VL - 8 IS - 4 UR - https://journal.hep.com.cn/fme N1 - 10.1007/s11465-013-0276-4 ER -