%A Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN %T A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method %0 Journal Article %D 2013 %J Front. Mech. Eng. %J Frontiers of Mechanical Engineering %@ 2095-0233 %R 10.1007/s11465-013-0276-4 %P 333-339 %V 8 %N 4 %U {https://journal.hep.com.cn/fme/EN/10.1007/s11465-013-0276-4 %8 2013-12-05 %X

A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabrication method. The main parts of the apparatus include actuating device, loading system, and control system. With a motorized XY linear stage, the maximum fabrication area of 50 mm × 50 mm can be achieved, and the maximum sliding speed of probes can be as high as 10 mm/s. Through locating steel micro balls into indents array, the preparation of multi-probe array can be realized by a simple and low-cost way. The cantilever was designed as a structure of deformable parallelogram with two beams, by which the fabrication force can be precisely controlled. Combining the friction-induced scanning with selective etching in KOH solution, various micro-patterns were fabricated on Si(100) surface without any masks or exposure. As a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may encourage the development of friction-induced fabrication method and shed new light on the texture engineering.