@article{Zhijiang WU:333, author = {Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN}, title = {A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method}, publisher = {Front. Mech. Eng.}, year = {2013}, journal = {Frontiers of Mechanical Engineering}, volume = {8}, number = {4}, eid = {333}, numpages = {6}, pages = {333}, keywords = {friction-induced fabrication;silicon;surface texture;friction;multi-probe}, url = {https://journal.hep.com.cn/fme/EN/abstract/article_4639.shtml}, doi = {10.1007/s11465-013-0276-4} }