Development and application of high-end aerospace MEMS

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Front. Mech. Eng. ›› 2017, Vol. 12 ›› Issue (4) : 567-573. DOI: 10.1007/s11465-017-0424-3
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Development and application of high-end aerospace MEMS

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Mech. Eng., 2017, 12(4): 567‒573 https://doi.org/10.1007/s11465-017-0424-3

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