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Frontiers of Mechanical Engineering

Front Mech Eng    2013, Vol. 8 Issue (4) : 333-339
A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method
Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN()
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China
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A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabrication method. The main parts of the apparatus include actuating device, loading system, and control system. With a motorized XY linear stage, the maximum fabrication area of 50 mm × 50 mm can be achieved, and the maximum sliding speed of probes can be as high as 10 mm/s. Through locating steel micro balls into indents array, the preparation of multi-probe array can be realized by a simple and low-cost way. The cantilever was designed as a structure of deformable parallelogram with two beams, by which the fabrication force can be precisely controlled. Combining the friction-induced scanning with selective etching in KOH solution, various micro-patterns were fabricated on Si(100) surface without any masks or exposure. As a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may encourage the development of friction-induced fabrication method and shed new light on the texture engineering.

Keywords friction-induced fabrication      silicon      surface texture      friction      multi-probe     
Corresponding Authors: QIAN Linmao,   
Issue Date: 05 December 2013
 Cite this article:   
Zhijiang WU,Chenfei SONG,Jian GUO, et al. A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method[J]. Front Mech Eng, 2013, 8(4): 333-339.
Fig.1  Sketch of the multi-probe micro-fabrication apparatus
Fig.2  Image of the mechanical part of apparatus
Fig.3  Manufacturing of multi-probe array. (a) Producing the indents array; (b) placing micro probes; (c) flattening the micro probes; (d) envelopment by the wax mold; (e) founding; (f) substrate polishing
Fig.4  Fabrication of the cantilever. (a) Original cantilever; (b) semicircular grooves were cut at both sides of the beam; (c) center parts and centers of the thinnest part were hollowed
Fig.5  Photo of the cantilever with a spring constant of 1378 N/m
Fig.6  Calibration of the spring constant
Fig.7  Route of ellipse with a initial position at (, )
Fig.8  Checked squares fabricated by scanning-scratch under = 1000 mN with a 2 × 2 probe array and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min
Fig.9  Line array fabricated by scratching under = 500 mN with a 1 × 2 probe array and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min
Fig.10  Ring fabricated by scratching under = 250 mN with a single probe and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min
1 Bhushan B. Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices. Microelectronic Engineering , 2007, 84(3): 387-412
doi: 10.1016/j.mee.2006.10.059
2 Blumenthal M D, Kaestner B, Li L, Giblin S, Janssen T J B M, Pepper M, Anderson D, Jones G, Ritchie D A. Gigahertz quantized charge pumping. Nature Physics , 2007, 3(5): 343-347
doi: 10.1038/nphys582
3 Senn T, Bischoff J, Nüsse N, Schoengen M, L?chel B.Fabrication of photonic crystals for applications in the visible range by nanoimprint lithography. Photonics and Nanostructures-Fundamentals and Applications , 2011, 9: 248-254
4 Schift H. Nanoimprint lithography: An old story in modern times? A review. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures , 2008, 26(2): 458-480
doi: 10.1116/1.2890972
5 Srivastava S K, Kumar D, Vandana, Sharma M, Kumar R, Singh P K. Silver catalyzed nano-texturing of silicon surfaces for solar cell applications. Solar Energy Materials and Solar Cells , 2012, 100: 33-38
doi: 10.1016/j.solmat.2011.05.003
6 Sharma S N, Bhagavannarayana G, Sharma R K, Lakshmikumar S T. Role of surface texturization in the formation of highly luminescent stable and thick porous silicon films. Materials Science and Engineering B , 2006, 127(2-3): 255-260
doi: 10.1016/j.mseb.2005.10.001
7 Lan H B, Ding Y C, Liu H Z, Lu B H. Review of template fabrication for nanoimprint lithography. Journal of mechanical engineering , 2009, 45(6): 1-13
8 Silverman P J. Extreme ultraviolet lithography: overview and development status. Journal of Microlithography, Microfabrication, and Microsystems , 2005, 4(1): 011006
doi: 10.1117/1.1862647
9 Yu B J, Dong H S, Qian L M, Chen Y F, Yu J X, Zhou Z R. Friction-induced nanofabrication on monocrystalline silicon. Nanotechnology , 2009, 20(46): 465303
doi: 10.1088/0957-4484/20/46/465303 pmid:19847028
10 Song C F, Li X Y, Yu B J, Dong H S, Qian L M, Zhou Z R. Friction-induced nanofabrication method to produce protrusive nanostructures on quartz. Nanoscale Research Letters , 2011, 6(1): 310
doi: 10.1186/1556-276X-6-310 pmid:21711819
11 Park J W, Lee S S, So B S, Jung Y H, Kawasegi N, Morita N, Lee D W. Characteristics of mask layer on (100) silicon induced by tribo-nanolithography with diamond tip cantilevers based on AFM. Journal of Materials Processing Technology , 2007, 187-188: 321-325
doi: 10.1016/j.jmatprotec.2006.11.151
12 Bhushan B. Nanoscale tribophysics and tribomechanics. Wear , 1999, 225- 229: 465-492
doi: 10.1016/S0043-1648(99)00018-6
13 Qian L M, Luengo G, Douillet D, Charlot M, Dollat X, Perez E. New two-dimensional friction force apparatus design for measuring shear forces at the nanometer scale. Review of Scientific Instruments , 2001, 72(11): 4171-4177
doi: 10.1063/1.1412860
14 Wang J H, Jin G D, Cao S F. Research of strain in-measurement sensor based on double cantilever beam. Chinese Journal of Sensors and Actuators , 2005, 18(3): 589-595
15 Guo J, Song C F, Li X Y, Yu B J, Dong H S, Qian L M, Zhou Z R. Fabrication mechanism of friction-induced selective etching on Si(100) surface. Nanoscale Research Letters , 2012, 7(1): 152
doi: 10.1186/1556-276X-7-152 pmid:22356699
16 Youn S W, Kang C G. Effect of nanoscratch conditions on both deformation behavior and wet-etching characteristics of silicon (100) surface. Wear , 2006, 261(3-4): 328-337
doi: 10.1016/j.wear.2005.11.007
17 Zhong S H, Liu B G, Xia Y, Liu J H, Liu J, Shen Z N, Xu Z, Li C B. Influence of the texturing structure on the properties of black silicon solar cell. Solar Energy Materials and Solar Cells , 2013, 108: 200-204
doi: 10.1016/j.solmat.2012.10.001
18 Zhang L C, Zarudi I. Towards a deeper understanding of plasticdeformation in mono-crystalline silicon. International Journal of Mechanical Sciences , 2001, 43(9): 1985-1996
doi: 10.1016/S0020-7403(01)00024-8
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