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Frontiers of Mechanical Engineering

Front Mech Eng    2013, Vol. 8 Issue (4) : 333-339     https://doi.org/10.1007/s11465-013-0276-4
RESEARCH ARTICLE |
A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method
Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN()
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China
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Abstract

A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabrication method. The main parts of the apparatus include actuating device, loading system, and control system. With a motorized XY linear stage, the maximum fabrication area of 50 mm × 50 mm can be achieved, and the maximum sliding speed of probes can be as high as 10 mm/s. Through locating steel micro balls into indents array, the preparation of multi-probe array can be realized by a simple and low-cost way. The cantilever was designed as a structure of deformable parallelogram with two beams, by which the fabrication force can be precisely controlled. Combining the friction-induced scanning with selective etching in KOH solution, various micro-patterns were fabricated on Si(100) surface without any masks or exposure. As a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may encourage the development of friction-induced fabrication method and shed new light on the texture engineering.

Keywords friction-induced fabrication      silicon      surface texture      friction      multi-probe     
Corresponding Authors: QIAN Linmao,Email:linmao@swjtu.edu.cn   
Issue Date: 05 December 2013
 Cite this article:   
Zhijiang WU,Chenfei SONG,Jian GUO, et al. A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method[J]. Front Mech Eng, 2013, 8(4): 333-339.
 URL:  
http://journal.hep.com.cn/fme/EN/10.1007/s11465-013-0276-4
http://journal.hep.com.cn/fme/EN/Y2013/V8/I4/333
Fig.1  Sketch of the multi-probe micro-fabrication apparatus
Fig.2  Image of the mechanical part of apparatus
Fig.3  Manufacturing of multi-probe array. (a) Producing the indents array; (b) placing micro probes; (c) flattening the micro probes; (d) envelopment by the wax mold; (e) founding; (f) substrate polishing
Fig.4  Fabrication of the cantilever. (a) Original cantilever; (b) semicircular grooves were cut at both sides of the beam; (c) center parts and centers of the thinnest part were hollowed
Fig.5  Photo of the cantilever with a spring constant of 1378 N/m
Fig.6  Calibration of the spring constant
Fig.7  Route of ellipse with a initial position at (, )
Fig.8  Checked squares fabricated by scanning-scratch under = 1000 mN with a 2 × 2 probe array and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min
Fig.9  Line array fabricated by scratching under = 500 mN with a 1 × 2 probe array and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min
Fig.10  Ring fabricated by scratching under = 250 mN with a single probe and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min
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