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Frontiers of Chemical Science and Engineering

Front. Chem. Sci. Eng.    2019, Vol. 13 Issue (3) : 485-492     https://doi.org/10.1007/s11705-019-1831-2
RESEARCH ARTICLE
Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD
Bin Xu1, Toshiro Kaneko1, Toshiaki Kato1,2()
1. Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan
2. Japan Science and Technology Agency (JST)-PRESTO, Sendai 980-8579, Japan
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Abstract

A pulse plasma chemical vapor deposition (CVD) technique was developed for improving the growth yield of single-walled carbon nanotubes (SWNTs) with a narrow chirality distribution. The growth yield of the SWNTs could be improved by repetitive short duration pulse plasma CVD, while maintaining the initial narrow chirality distribution. Detailed growth dynamics is discussed based on a systematic investigation by changing the pulse parameters. The growth of SWNTs with a narrow chirality distribution could be controlled by the difference in the nucleation time required using catalysts comprising relatively small or large particles as the key factor. The nucleation can be controlled by adjusting the pulse on/off time ratio and the total processing time.

Keywords single-walled carbon nanotubes      chirality-controlled synthesis      pulse plasma chemical vapor deposition     
Corresponding Authors: Toshiaki Kato   
Just Accepted Date: 24 June 2019   Online First Date: 30 July 2019    Issue Date: 22 August 2019
 Cite this article:   
Bin Xu,Toshiro Kaneko,Toshiaki Kato. Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD[J]. Front. Chem. Sci. Eng., 2019, 13(3): 485-492.
 URL:  
http://journal.hep.com.cn/fcse/EN/10.1007/s11705-019-1831-2
http://journal.hep.com.cn/fcse/EN/Y2019/V13/I3/485
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Fig.1  (a,b) Model for the growth of SWNTs with (a) long and (b) short growth times; (c) Imaging model of SWNT growth using the new pulse plasma CVD method.
Fig.2  (a–o) Raman measurement of SWNT growth with 6, 12, and 24 pulse repetitions; (a–c) G-band mapping; (b–f) corresponding Raman spectrum is marked in the map using a red cross; (i–o) RBM mapping at wavelengths of 300 cm–1 (g–m) and 200 cm–1 (h–n), and the corresponding RBM; (p) Yield and diameter distribution of SWNTs synthesized by pulse plasma CVD and continuous plasma CVD based on Raman measurement.
Fig.3  PLE mapping of SWNTs grown with different number of pulse repetitions. (a) 10 s × 3 times and (b) 15 times.
Fig.4  (a–c) AFM image and (d–f) histogram of the length of SWNTs grown with different pulse repetitions: (a,d) 3, (b,e) 6, and (c,f) 15 times; (g) Average SWNT length as a function of number of pulse repetitions.
Fig.5  Diameter distribution vs. pulse (a) on time with the off time fixed and (b) off time with the on time fixed; (c) diameter distribution vs. different pulse on and off times; (a–e) diameter distribution vs. total process time; (f) diameter distribution vs. pulse on/off time ratio; (a–f) are derived from PLE mapping data; (g–h) Calculated carbon dissolution rate vs. pulse on/off time ratio.
1 A Ueda, K Matsuda, T Tayagaki, Y Kanemitsu. Carrier multiplication in carbon nanotubes studied by femtosecond pump-probe spectroscopy. Applied Physics Letters, 2008, 92(23): 233105
2 A Javey, J Guo, Q Wang, M Lundstrom, H Dai. Ballistic carbon nanotube field-effect transistors. Nature, 2003, 424(6949): 654–657
3 C Qiu, Z Zhang, M Xiao, Y Yang, D Zhong, L M Peng. Scaling carbon nanotube complementary transistors to 5-nm gate lengths. Science, 2017, 355(6322): 271–276
4 X He, N Fujimura, J M Lloyd, K J Erickson, A A Talin, Q Zhang, W Gao, Q Jiang, Y Kawano, R H Hauge, et al.. Carbon nanotube terahertz detector. Nano Letters, 2014, 14(7): 3953–3958
5 H S Kim, W J Kim, M S Strano, J H Han. Optical detection of argon gas flow based on vibration-induced change in photoluminescence of a semiconducting single-walled carbon nanotube bundle. Journal of Nanoscience and Nanotechnology, 2014, 14(12): 9131–9133
6 G Lolli, L Zhang, L Balzano, N Sakulchaicharoen, Y Tan, D E Resasco. Tailoring (n,m) structure of single-walled carbon nanotubes by modifying reaction conditions and the nature of the support of CoMo catalysts. Journal of Physical Chemistry B, 2006, 110(5): 2108–2115
7 C Z Loebick, S Derrouiche, N Marinkovic, C Wang, F Hennrich, M M Kappes, G L Haller, L D Pfefferle. Effect of manganese addition to the Co-MCM-41 catalyst in the selective synthesis of single wall carbon nanotubes. Journal of Physical Chemistry C, 2009, 113(52): 21611–21620
8 C Z Loebick, S Derrouiche, F Fang, N Li, G L Haller, L D Pfefferle. Effect of chromium addition to the Co-MCM-41 catalyst in the synthesis of single wall carbon nanotubes. Applied Catalysis A, General, 2009, 368(1-2): 40–49
9 Z Ghorannevis, T Kato, T Kaneko, R Hatakeyama. Narrow-chirality distributed single-walled carbon nanotube growth from nonmagnetic catalyst. Journal of the American Chemical Society, 2010, 132(28): 9570–9572
10 L Zhang, P Hou, S Li, C Shi, H Cong, C Liu, H Cheng.In situ TEM observations on the sulfur-assisted catalytic growth of single-wall carbon nanotubes. Journal of Physical Chemistry Letters, 2014, 5(8): 1427–1432
11 P Li, X Zhang, J Liu. Aligned single-walled carbon nanotube arrays from rhodium catalysts with unexpected diameter uniformity independent of the catalyst size and growth temperature. Chemistry of Materials, 2016, 28(3): 870–875
12 M He, H Jiang, I Kauppi, P V Fedotov, A I Chernov, E D Obraztsova, F Cavalca, J B Wagner, T W Hansen, J Sainio, et al.. Insights into chirality distributions of single-walled carbon nanotubes grown on different CoxMg1−xO solid solutions. Journal of Materials Chemistry. A, Materials for Energy and Sustainability, 2014, 2(16): 5883–5889
13 F Yang, X Wang, D Zhang, J Yang, D Luo, Z Xu, F Peng, X Li, R Li, Y Li, et al.. Chirality-specific growth of single-walled carbon nanotubes on solid alloy catalysts. Nature, 2014, 510(7506): 522–524
14 F Yang, X Wang, J Si, X Zhao, K Qi, C Jin, Z Zhang, M Li, D Zhang, J Yang, et al.. Water-assisted preparation of high-purity semiconducting (14,4) carbon nanotubes. ACS Nano, 2017, 11(1): 186–193
15 F Yang, X Wang, D Zhang, K Qi, J Yang, Z Xu, M Li, X Zhao, X Bai, Y Li. Growing zigzag (16,0) carbon nanotubes with structure-defined catalysts. Journal of the American Chemical Society, 2015, 137(27): 8688–8691
16 B Xu, T Kaneko, Y Shibuta, T Kato. Preferential synthesis of (6,4) single-walled carbon nanotubes by controlling oxidation degree of Co catalyst. Scientific Reports, 2017, 7(11149): 1–9
17 M He, P V Fedotov, A Chernov, E D Obraztsova, H Jiang, N Wei, H Cui, J Sainio, W Zhang, H Jin, et al.. Chiral-selective growth of single-walled carbon nanotubes on Fe-based catalysts using CO as carbon source. Carbon, 2016, 108: 521–528
18 R Rao, N Pierce, D Liptak, D Hooper, G Sargent, S L Semiatin, S Curtarolo, A R Harutyunyan, B Maruyama. Revealing the impact of catalyst phase transition on carbon nanotube growth by in situ Raman spectroscopy. ACS Nano, 2013, 7(2): 1100–1107
19 B Wang, C H P Poa, L Wei, L Li, Y Yang, Y Chen. (n,m) Selectivity of single-walled carbon nanotubes by different carbon precursors on Co-Mo catalysts. Journal of the American Chemical Society, 2007, 129(29): 9014–9019
20 M Picher, E Anglaret, R Arenal, V Jourdain. Processes controlling the diameter distribution of single-walled carbon nanotubes during catalytic chemical vapor deposition. ACS Nano, 2011, 5(3): 2118–2125
21 J Wang, P Liu, B Xia, H Wei, Y Wei, Y Wu, K Liu, L Zhang, J Wang, Q Li, et al.. Observation of charge generation and transfer during CVD growth of carbon nanotubes. Nano Letters, 2016, 16(7): 4102–4109
22 T Kato, R Hatakeyama. Direct growth of short single-walled carbon nanotubes with narrow-chirality distribution by time-programmed plasma chemical vapor deposition. ACS Nano, 2010, 4(12): 7395–7400
23 B Xu, T Kato, K Murakoshi, T Kaneko. Effect of ion impact on incubation time of single-walled carbon nanotubes grown by plasma chemical vapor deposition. Plasma and Fusion Research, 2014, 9: 1206075-1-3
24 S Maruyama, R Kojima, Y Miyauchi, S Chiashi, M Kohno. Low-temperature synthesis of high-purity single-walled carbon nanotubes from alcohol. Chemical Physics Letters, 2002, 360(3-4): 229–234
25 T Kato, G H Jeong, T Hirata, R Hatakeyama. Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition. Thin Solid Films, 2004, 457(1): 2–6
26 S H Shiau, C W Liu, C Gau, B T Dai. Growth of a single-wall carbon nanotube film and its patterning as an n-type field effect transistor device using an integrated circuit compatible process. Nanotechnology, 2008, 19(10): 105303
27 M J O’Connell, S M Bachilo, C B Huffman, V C Moore, M S Strano, E H Haroz, K L Rialon, P J Boul, W H Noon, C Kittrell, et al.. Band gap fluorescence from individual single-walled carbon nanotubes. Science, 2002, 297(5581): 593–596
28 R B Weisman, S M Bachilo. Dependence of optical transition energies on structure for single-walled carbon nanotubes in aqueous suspension: An empirical Kataura plot. Nano Letters, 2003, 3(9): 1235–1238
29 B Hou, C Wu, T Inoue, S Chiashi, R Xiang, S Maruyama. Extended alcohol catalytic chemical vapor deposition for efficient growth of single-walled carbon nanotubes thinner than (6,5). Carbon, 2017, 119: 502–510
30 K Ostrikov, H Mehdipour. Thin single-walled carbon nanotubes with narrow chirality distribution: Constructive interplay of plasma and Gibbs-Thomson effects. ACS Nano, 2011, 5(10): 8372–8382
31 I Lifshitz, V Slyozov. The kinetics of precipitation from supersaturated solid solutions. Journal of Physics and Chemistry of Solids, 1961, 19(1-2): 35–50
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