Where physics meets chemistry: Thin film deposition from reactive plasmas

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Front. Chem. Sci. Eng. ›› 2016, Vol. 10 ›› Issue (4) : 441-458. DOI: 10.1007/s11705-016-1598-7
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Where physics meets chemistry: Thin film deposition from reactive plasmas

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Chem. Sci. Eng., 2016, 10(4): 441‒458 https://doi.org/10.1007/s11705-016-1598-7

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