A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer

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Front. Inform. Technol. Electron. Eng ›› 2015, Vol. 16 ›› Issue (6) : 497-510. DOI: 10.1631/FITEE.1400349

A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Inform. Technol. Electron. Eng, 2015, 16(6): 497‒510 https://doi.org/10.1631/FITEE.1400349

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